EPC SERIES · Edge Measurement Sensor
MES07-FC4 Series / MES07-LF
A collimated laser CMOS sensor that precisely measures the edge position of film, sheet, and wafer materials simultaneously across up to 4 channels.
Overview
Contamination-Resistant CMOS Edge Measurement
The EPC series uses a CMOS sensor as its light-receiving element, making it far less affected by contamination than sensors that use a PD element. Even if overall light reception drops due to contamination, the measured position does not shift, and a contamination detection alarm can output a warning based on the degree of contamination.
An Edge Ignore function prevents sudden changes in edge data caused by tabs such as electrodes at the edge of the detected object, with configurable delay time (0.5ms–127ms) and ignore width (0–7mm).
Model Lineup
Three Controllers for Every Communication Protocol
Choose from Analog, EtherCAT, or Profinet communication models to match your equipment environment.
Analog Version
A standard model with voltage/current analog output for simple integration with existing equipment.
EtherCAT Version
Supports EtherCAT communication, ideal for equipment that requires high-speed real-time control.
Profinet Version
Supports Profinet communication, ideal for Profinet-based PLC environments such as Siemens.
Applications
Suited to These Processes
Film / Sheet Camber & Width Measurement
Connect two sensors to the controller to measure the roller and sheet simultaneously, enabling accurate thickness measurement.
Wafer Eccentricity / Notch Position Measurement
Reliably measures the eccentricity and notch position of highly transparent wafer glass.
Film / Sheet Thickness Measurement
Uses the calculation function of two sensor heads to perform camber measurement and film width measurement simultaneously.
Specifications
Product Specifications
Based on MES07-LF (sensor head) / MES07-FC4E (controller)
| Model | MES07-FC4 (Analog) / MES07-FC4E (EtherCAT) / MES07-FC4P (Profinet) |
|---|---|
| Measurement Width | 7㎜ |
| Measurement Distance | 10 ~ 300㎜ |
| Sampling Interval | 500㎲ (2㎑/S) |
| Linearity | ±20㎛ or less * |
| Repeatability | ±1㎛ or less * |
| Channels | 4CH (FND 4CH controller) |
| Data Display | 4-digit FND × 4, per channel |
| Operating Temperature | 0 ~ 50℃ |
| Operating / Storage Humidity | 30 ~ 85% RH |
| Power Supply | Sensor head 5VDC±10% / Controller 12–30VDC±10% |
| Material | Sensor head case: Aluminum, Lens: Glass / Controller case: ABS |
| Light Source | Visible semiconductor laser, CLASS I, 650nm |
| External Communication | Analog (FC4) / EtherCAT (FC4E) / Profinet (FC4P) |
| Extension Cable | EPC-FC-CBJ |
* Based on a 20㎜ distance between emitter and receiver, WD 10㎜, and object position moving 0.5–3.5㎜ from the center of the measurement width. Refer to the product manual for detailed conditions.
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